Abstract
This study investigates the performance of the piezoelelctrically actuated micropump. The micropump is made by exposure, lithography, etching and bonding on 4 inch wafer. The effects of driving voltage and frequency on the displacement of piezoelectric material and the flow rate of the micropump are investigated. The experimental results indicate that the displacement of the piezoelectric material decreases with frequency. The displacements of the piezoelectric material range from 2.7μm-20.47μm. The flow rate of the micropump is proportional to the applied voltage. When operated at the voltage of 140 V and the frequency of 20 Hz, the flow rate of the single micropump is about 91 µ1/min with the back pressure of 400Pa. At the same input signal, the maximum flow rate of the double parallel micropump is 1.5 times of the single micropump, and is approximately twice of the single micropump for triple parallel operation. The relationship between frequency and flow rate obtained from measurement had been interpreted by physics principles and the derived mathematic regression method.