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多孔矽蝕刻製成具有光子晶體結構之高靈敏度重金屬檢測器
Thesis

多孔矽蝕刻製成具有光子晶體結構之高靈敏度重金屬檢測器

賴建任
Masters, 國立清華大學, 工程與系統科學系
2014

Abstract

傅立葉紅外光譜儀 多孔矽蝕刻 重金屬檢測 光子晶體 FTIR Porous silicon etching heavy metal ion detection photonic crystal
Water is essential to human life material, settlement of people's lives as much dependent on the water area and growth. Human society continues to progress from the first agricultural society through the industrial revolution until now, people with the growth of industry and technology have had a relatively affluent life than ever before. But in the booming industry it has been accompanied by a number of environmental pollution produced, such as carbon dioxide cause global warming caused by industrial waste water in various forms of water pollution and so on. This will gradually hurting the environment we live. The heavy metal pollution in water pollution in 70 to 80 years is relevant agricultural, fishery and animal husbandry against Taiwan, such as arsenic, cadmium, mercury, lead and heavy metal pollution. In view of this, the aim of this study is related to the manufacture of heavy metals in water pollution detection mechanism. The current detection mechanism mostly use the more expensive equipment or the use of complex chemical titration step approach to the analysis of heavy metals in aqueous solution. In this experiment, the first generation of wafer-dimensional photonic crystal having a characteristic and by a simple chemical synthesis and surface modification of it in Fourier infrared spectroscopy (FTIR) for detecting signals of heavy metals, and to achieve qualitative and quantitative results. The second generation of photonic crystal wafer as visible light with a wavelength of electrochemical reduction of metal ions to be measured directly in the porous silicon precipitates hole caused large refractive index change, to enhance the signal strength and the detection limit of the effect. The first two chapters illustrate the application of this study motive and related experiments. Today introduced the relevant heavy metal detection equipment, introduces the basic principles of photonic crystals with porous silicon etching works. The third and fourth chapters compared with experimental design processes and related process steps. Fifth and sixth chapters, compared with results of the discussions and conclusions. Literature review is included in Chapter VII.

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