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多頭原子力顯微鏡探針應用於奈米級動態檢測
Thesis

多頭原子力顯微鏡探針應用於奈米級動態檢測

邱彥凱
Masters, 國立清華大學, 工程與系統科學系
2014

Abstract

原子力顯微鏡 多頭奈米結構 高速與高解析之奈米級動態檢測 Atomic fore microscope (AFM) Multi nano tip structures High speed/resolution dynamic nanodetection
In this paper, we nano-engineered commercial atomic force microscope (AFM) probes with multi nano tip structures for high speed/resolution dynamic nanodetection. The tip radius could be shrunk down to 2.5 nm, and the time resolution could be approaching 10 ms for measuring particle movement on piezoelectric actuator (PZT). The multi tip AFM can be applicable for detecting the dynamic movement of bio-molecules. To further enhance the time resolution for resolving molecule movement, this research proposes a simpler method to detect dynamic nanomovement by modifying the AFM tip from single tip into multi tips, which can greatly enhance the time resolution into ms level (10 times improvement), while spatial resolution is kept at standard value and the AFM control system is kept unchanged. The multi head tips are designed to measure nano displacement of F1 adenosine triphosphate synthase (F1-ATPase). From the experimental results, multi tips probe has successfully manufactured by deposition of gold nanaparticles (GNPs) and reactive ion etching (RIE) for dynamic nanodetection. Then we demonstrate that single tip and multi tips probe can detecting nanomovement of PZT and F1-ATPase.

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