Abstract
abstract hide
- Title
- 奈米3D微影技術之加工參數優化
- Translated title
- 奈米3D微影技術之加工參數優化
- Creators
- 游鈞文
- Contributors
- 傅建中 (Advisor)
- Awarding Institution
- 國立清華大學, 動力機械工程學系; Masters
- Theses and Dissertations
- Masters, 國立清華大學, 動力機械工程學系
- Language
- Traditional Chinese
- Resource Type
- Thesis
- Date published
- 2017