Abstract
This study aims to determine the thin film material properties using the bending test of micromachined cantilevers. The bending test was performed by using a nanoindentation loading system. There are two merits in this study, (1) the indentation of the film during the test was considered and corrected, and (2) the boundary effect was considered in the model by finite element method. In application, the elastic modulus of electroplating Nickel film with 11μm thick and thermal oxide film with 2.1μm were characterized. According to the results in this study, the load-deflection tests of the micromachined cantilevers using a nano-indentation system are significantly improved. Because the approach is very simple and straightforward, it can be applied as a supplement to the other measurement techniques.