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奈米碳管的高頻電性量測分析及電路模型建立
Thesis

奈米碳管的高頻電性量測分析及電路模型建立

李建樑
Masters, National Tsing Hua University
2004

Abstract

奈米碳管高頻量測頻率共振 carbon nanotubeRF measurementfrequency resonance
Our nanotubes were growth from lithographically patterned thin film catalyst structures using thermal-CVD. There are two majors experimental axial processes. The initial experiments called “Pre-Electrode” were in-situ grow carbon nanotubes on the electrodes. The latterly experiments called “Post-Electrode” were evaporated electrodes after the thermal-CVD process. Next, we measure the RF parameters (S-parameter, ex: reflection coefficient ) of our samples to find the RF properties of two-ports network. We designed the same electrode layout for “Pre-Electrode” and “Post-Electrode” processes. The GSG coplanar waveguide transmission line was designed for matching the RF probes and characteristic impedance 50 Ohms matching circuit. We used e-Beam lithography technique to fabricate the micro-transmission lines for the “Post-Electrode” process. Thus, we could control the density and quality of nanotubes to truly measure RF signals of individual SWNT. All we find the LC resonance at the lower microwave frequencies (<10GHz) for carbon nanotubes samples. To present the demonstration of single-walled carbon nanotubes served as the strong inductors. In contrast, there was no this effects for the other samples without carbon nanotubes. We construct a simple LC impedance-matching circuit to fitting the experiment data.

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