Abstract
The semiconductor industries due to the high complexity of the production technologies, and high-risk equipments within a wide range of flammable, explosive, highly toxic and corrosive properties of chemicals, the damage risk of accident is higher than other industries. Resulting from the improper operation, control or management plus the closed effect of the clean room, it will cause the loss, processes interrupted, corporate image harmed and even casualties of employees. How to effectively prevent occupational accidents plays an important rule among each enterprise. However, with advances in semiconductor technology and new process development, the facilities become older and older. The traditional industrial safety behind the use of performance indicators is clearly inadequate, the leading indicators need to cover the systematic development of industrial safety performance indicators with hierarchical structure, meanwhile to complement the gap, the traditional industrial safety indicators assessing the frequency and severity only. In this study, we focus on establishing a framework of comprehensive industrial safety performance indicators and presenting the key leading indicators to provide in-formation in the semiconductor industry. Immediate response to the possible harm, it provides decision-makers early signs of prevention in the first place. The purposes are to prevent occupational hazards, to reduce production interruption losses, to drop damage to corporate image and other negative effects as well as the protection of life and proper-ty safety of employees. Finally, the research utilizes a semiconductor fab in Taiwan as an empirical study to verify the validity.