Abstract
This study integrated Failure Mode Effect and Criticality Analysis, Fault Tree, and Event Tree methods to develop a research framework for improving process technology in semiconductor industry. We specified the steps of the required data for the implementation of FMEA. In particular, we used three cases in a semiconductor fabrication for illustrations. We discussed the requirements for implementing FMEA at high-tech industries, and concluded with future research. We found that the proposed framework can be used as a basis for improving process technologies and managing domain knowledge and findings.