Abstract
The indexes for semiconductor manufacturing management are complicated and interrelated. Therefore, it is hard to clarify the relationships among the indexes to specify useful rules for production management. Existing approaches rely on following individual indexes without considering the production system as a whole. This study aims to fill the gaps by review the related studies on semiconductor manufacturing management and develop a complete set of performance indexes in hierarchy. In addition, we develop a web-based semiconductor manufacturing information system to facilitate production management and effective communication. In particular, four functionalities are identified and developed as follow: (i) an information module for daily operation reports, (ii) a monitoring module for key performance indexes, (iii) an information classification and retrieval module, (iv) a data mining module for production data analysis. These modules are indeed interrelated and integrated, though they can also perform designed functions independently. Furthermore, the accumulated information is organized to facilitate knowledge management. The authorized users can access the developed Internet-based system without geographical barrier. A prototype has been developed and implemented in a semiconductor fab in Taiwan. This study summarizes our findings and concludes with further research.