Abstract
In this thesis we implement and finish a software tool for parasitic extraction, which can be used in the MEOL of advanced process. With the miniaturization of the technology, many processes of technology will not as same as usual, so the MEOL parasitic extraction will be a new issue. We will show the importance of MEOL, and let MEOL be protected just like FEOL. By the Application Programming Interface (API), we can combine the parasitic parameter of MEOL with FEOL and BEOL, after that we will support it to the designer. And we will describe the methodology of what we propose to deal with the extraction of the parasitic parameter of MEOL, and also shown by software. This software is called Accurate Software API for MEOL Modeling (ASAM). The reason why we propose a new methodology different from the general method on pattern matching is because the connections of the Metal1 and the transistors will contain multi-layers instead of a simple contact. And the impacts of not only different layers but also different nets’ narrow spacings are decreasing, so the influences of the parasitic parameters are more important. To simulate the parasitic parameter of MEOL, we use region query to scan every layer in every net, so we can obtain net by net capacitance. And because the pitch in MEOL repeats in general condition, we can observe that the nearest neighbor to the layer dominates the capacitance. Finally, we can simplify the structure, use the spacing between different layers to obtain the capacitance in ASAM library and enhancing the ASAM accuracy.