Abstract
In this study, we will make micro actor devices by MEMS technology. By assembling these devices into miniature camera module, it can provide focusing ability and even zooming ability. These MEMS devices could make AF camera smaller and higher efficiency. Besides, these devices could decrease the cost by batching manufacture and using fewer parts. Devices are driven by magnetic force. Springs in the device are made by single crystal silicon, which avoid the damage by fatigue of materials, so the life time of device will be longer than other metal device, and the optical quality is better than other VCM actuator also. Compared with VCM actuator, the device in this study is less components quantity and easy to assemble. This study will design the device structure and driving source. It also realizes the devices by different fabrication process. After that, devices will be tested by different experiment to get the performance and the possibility of assembling the device into miniature auto focusing camera module.