Abstract
The fabrications and applications of micro probes integrated with other MEMS components are investgated in this study. Two typical cases in microprobe, multielectrode array (MEA) and micro-force sensor, have been applied for illustrating the variety of fabricating MEMS micro-probes. The multielectrode array with signal lines can be utilized for sensing bio-information. For enhancing recording sensitivity, the potential of integrating the pre-amplifier enables to decrease the distance between interconnection passway. On the other hand, a simple fabrication process is achieved for the proposed micro-force sensor with movable plate and torsional spring. The proposed processes in these devices have their common characteristic in local oxidation for providing the electrical isolation in multielectrode array and improving the sharpness of the microprobe on the micro-force sensor.