Abstract
This research focuses on the methods of making the different hydrophilic ability of a chip. We will apply this to the collect the product of micro fuel cell- water. In this research, we use the thick photo resist-SU8 to establish the structure of micro channel. We try four different methods to make the different hydrophilic ability of a chip. First, we directly use several kinds of photo resists as the resist layer against O2 plasma hydrophilic treating. Second, we try SAMs coating on Au with lift off process. Third, we directly drop the liquid contained SAMs into micro channels coated by Au. Finally, Teflon by lift of process is used as hydrophobic material and O2 plasma treats the hydrophilic micro channels. All the methods can reach the goal of different hydrophilic abilities, but not to the same degree. In the testing of droplets, it is proved that the hydrophilic micro channels can take away most droplets. And in vapor test, we find most vapors condensed in hydrophilic channels. Besides the collection of water in micro fuel cells, the test result of this research can also apply in drug delivery, cooling of electronic devices, and μTAS.