Abstract
The gyro is getting more important applications in many fields. A traditional gyro has some drawbacks, for example, they are bulky in volume and wear of bearings is not avoidable. However, the vibratory micro gyro can sense changes of angular velocity based on conservation of momentum and due to its simple and fixed structure the gyro doesn’t has the problem of wear. The vibratory gyro has long operating time. The size of a vibratory gyro is small so it has higher bandwidth and better linearity then those traditional gyro. This research is designed a two-dimensional vibratory micro-gyro which be driven by electro-static force, transduce angular velocity by capacitance. The micro gyro is fabricated by high aspect ratio micromachining process. According to the results of design, the gyro will be driven by electrostatic with 2.5 volts without vacuum. In the operating range of 0-200 deg/sec the sensitivity of gyro is 0.02 deg/secand the operation temperature range is -40℃-85℃. The size of fabricated device is 5mm×5mm×50um and structure of the gap is 3 um.