Abstract
The fatigue behavior of the micro cantilever beam loaded by various magnetic forces is investigated. The MEMS fabrication techniques, such as exposure, lithography, etching, etc., are applied to manufacture the micro structures on silicon wafer. FEM and SEM are employed to analyze the fractographies, stresses, and strains. The experimental results show that the deformation, stress and strain increase as the magnetic force increases. Besides, the fatigue cycle time decreases while the load raises or the beam length increases.