Abstract
Micro actuator play an important role in micro-electro-mechanical system, but any actuator has it’s adaptive application, if you want the system can do his best, the choice of actuator would become vary important.This thesis will discuss about the motion、the shape、the dimension、 the frequency and the driving voltage of scratch drive actuator, and fabricate the device by modified MUMP’s. From the experiment we can prove that the triangle scratch drive actuator has better ability of push、pull and motion. Although scratch drive actuator has the advantage of which can generate force about 100□n and has long working distance but it also has problem about wearing、 residual charge and can’t act so many times as comb drive actuator, so scratch drive actuator is adaptive for long working distance and great generation force but low operation number of times.This thesis will demonstrate three application for one shoot motion like 3D micro mirror, micro position stage, variable optical attenuator, so we can develop the virtue of scratch drive actuator and avoid the fault of reliability.