Abstract
In this study, we used the commercial software COMSOL numerical simulation, to simulate the microwave-excited linear plasma source coaxial slow - wave structure. Our purpose is to establish a large linear plasma source with uniform density, and observe the physical characteristics in coaxial slow - wave structure. Coaxial structure is composed of central metal conductor, Teflon, air and quartz. We used COMSOL numerical simulation software to design cavity, then simulate the plasma by setting parameters.From the simulation, we get two conclusions. (1) We observed the phenomenon of mode transition.(2) We have successfully developed a large and uniform plasma source.