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微波表面波電漿中之電漿共振反應
Thesis

微波表面波電漿中之電漿共振反應

管維中
Masters, 國立清華大學, 物理系
1999

Abstract

微波 表面波 電漿 共振 電漿振盪 Langmuir Probe Plasma Surface Wave Resonance EEDF Microwave Plasma Oscillation
Plasma has a specific oscillation called as Plasma Oscillation. When Plasma Oscillation and Electromagnetic wave have the same frequency, there exist a resonance between the plasma and the electromagnetic wave . In non-uniform Plasma, the electric field becomes a local maximum if the local plasma density is equal to the resonance density. In accordance with the theory, the measured maximum value of the resonance response is proportional to the plasma density gradient while the measured spatial width of the plasma resonance is inversely proportional to the plasma density gradient. In this thesis, we use Langmuir probe to measure the characteristic of Plasma and use short dipole antenna to measure the amplitude of electromagnetic wave.

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