Abstract
There are two topics in this thesis; one researched the vibration system for micro inertial sensor, the other researched the APM sensor phase detecting circuit. The gyroscope sensor applies to military equipments, medicine (surgical instruments), civil use etc. which need position information. We analyze, design, and implement the driving circuit. The object of the design is a driving system which needs none of additional equipment to actuate the sensor into a vibration mode. So we combine the driving circuit and gyroscope body as an oscillation system. By appropriate phase controlling and high-gain amplifying the signal sensed from one of driving electrodes and feeding it back to the other electrode, oscillation can be stably built up. As the driving chip is completely simulated, we handed it over to CIC for taping out by TSMC. Then we tested the implemented chip to check input and output signal phase has 90˚ phase shift and output signal is □2.5 V square waves. APM sensor has implemented by our lab senior member. Now we research a phase detecting circuit suited for APM sensor applied for semiconductor process real-time monitor. We used the RF electrical components to implement the circuit, and then tested it function. Finally, we set the sensor on the etching machine wall and used the phase detecting circuit to monitor the sensor phase variation with DAQ card and LabVIEW® program. The film coated on etcher wall thicker and heavier, the more phase decrease. The phase variation is roughly 0.68˚/nm equal 0.72˚/ng.