Abstract
Taiwan's semiconductor manufacturing industry has been in maturity, each company's process capability is not so different, product diversity and complexity of manufactory processes, and hundreds of steps manufacturing processes are not allowed any one process step abnormalities or human error. The slightest mistake could result in the loss of millions and even affect the company's reputation. Therefore, the quality control process is very important. One of the solutions for companies facing fierce competition environment is to establish risk management and control mechanisms in the semiconductor industry.Based on literature review, FMEA technique has been used in various industries. Among the many ways in the semiconductor industry for process quality improvement, FMEA techniques are best suited to applications in the complex manufacturing process of the semiconductor industry. In this study, FMEA techniques were applied to define the function and purpose of each manufacturing process, to list of the potential failure modes and root cause, and to analyze the severity of failure, frequency of occurrence and detection of difficulty. Then risk priority number (RPN) was calculated by assessment classification table, and improvement plan and completion date were proposed. After the implementation of the improvement plan, the risk priority index was reevaluated until it reached a standard level. Finally, the case study revealed the improvement of process quality.In this study, FMEA was applied and quality improvement techniques were implemented to solve cases High Voltage process yield issues, and the main conclusions are summarized as follows:1).Providing a process technology knowledge platform as a basis for a new product or process of rapid mass production.2).Establishing quality improvement process as the company’s operation guidelines for process FMEA.3).Solving process yield cases, and improving production efficiency and product yield.