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應用差分干涉對比術於微米級透明材質的高度量測方法
Thesis

應用差分干涉對比術於微米級透明材質的高度量測方法

劉濬嘉
Masters, 國立清華大學, 動力機械工程學系
2009

Abstract

差分干涉對比術 修正型傅立葉相位積分法 雙波長相移干涉術 定量化相位還原 渥拉斯頓稜鏡 Differential Interference Contrast Modified Fourier Phase Integration Two-Wavelength Phase-Shifting Interferometry quantitative phase restoration Wollaston prism
Due to the development of Opto-electronic industry such as flexible display, Indium Tin Oxide (ITO), lots of substrate trend to use transparent materials. In recent years, the technique of measure transparent materials is still in investigation. It is the most important to measure the height of transparent materials. This study designed one integration method to improve the Differential Interference Contrast (DIC) microscopy system for transparent materials. Firstable, we can get the differential image when light pass through virtual model in DIC. The Hilbert Transform theory presented by M. R. Arnison on 2000 [34] was corrected and reconstructed in different topography by author successfully. This modified method can be applied for the different types edges, such as gentle ascent、steep slope、and step. We set the experiment of transmitted DIC. The author use different wavelength in the test of DIC and compare the results. Through the Modified Fourier Phase Integration (MFPI), the micro-level gentle ascent edge on transparent materials can be reconstructed precisely.

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