Abstract
As the progress of IT, the need for high speed and high density data storage has become increasingly important. Denser and faster data storage is needed for optical data storage system. However, commercial optical disk pick-up head assembles optical components complex and precisely. The cost and the precision become the issue. By the way, the potential of developing portable optical data storage is high. So, the MEMS technology with batch and self-align property become a way to make faster and more tiny pick-up head.This study proposes a novel design of micro-focusing stage for optical pick-up head application. The stage witch fabricated by MUMPs-like process and backside etching process is make up of several stress-induced beams and a micro-lens plate. The stress-induced beams not only use for self-assembly but actuating stage. By controlling these stress-induced beams, the stage have piston motion to adjusting focal length and tilt motion to compensating the deviation of disk. Making the laser spot always on disk and laser beam always been orthogonal with disk.