Abstract
This research presents a novel design of the optical pickup head for reducing cost as well as improving the dynamic behavior due to its heavy mass and large volume deficiencies. The electrostatic deformable mirror designed and fabricated on the basis of micro-electro-mechanical technique are used to replace the oblique reflection mirror. The focus ability of the deformable mirror may also remove the object lens from in the pickup head. With this design, pickup head can be much lighter and smaller to meet the future trend of the optical storage technology. The relationship between membrane deformation and applied voltage are constructed based on the theory of geometric optics and theory of plates. The static and dynamic behaviors of the deformable mirror are measured by an interfere microscope and laser doppler vibrometer. Good agreement between the experimental and analytical results indicates the correctness of the proposed design method.