Abstract
As the progress in sub-micron and nano technology, micro-contact printing technology has become one of the dominant fabrication processes in today's micro-electronics and optoelectronics industries. As a result, the integration of mechanical imprinting mechanisms with precision position/force motional control has been the key issue in the development of micro-contact printing equipments. This thesis has focused on system simulations and dynamic analysis in the applications of voice-coil actuators employed for micro-contact printing technology. Moreover, exploration into relevant subjects have also been conducted in details. Hence, from magnetic circuit analysis of the actuator to design of control algorithms, commercial software packages were employed for establishing models and pertinent parametric analysis. Furthermore, the precision control of position and force were comprehensively investigated with academic interests; and finally, the goal of systematic research on micro-contact printing has been achieved for providing the solid backgrounds in key components design and system implementation.