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應用音圈致動器於微觸印刷技術之研究
Thesis

應用音圈致動器於微觸印刷技術之研究

曾國展
Masters, 國立清華大學, 動力機械工程學系
2004

Abstract

微觸印刷 音圈致動器 位置力量控制 Micro-contact Printing Position Control Force Control
As the progress in sub-micron and nano technology, micro-contact printing technology has become one of the dominant fabrication processes in today's micro-electronics and optoelectronics industries. As a result, the integration of mechanical imprinting mechanisms with precision position/force motional control has been the key issue in the development of micro-contact printing equipments. This thesis has focused on system simulations and dynamic analysis in the applications of voice-coil actuators employed for micro-contact printing technology. Moreover, exploration into relevant subjects have also been conducted in details. Hence, from magnetic circuit analysis of the actuator to design of control algorithms, commercial software packages were employed for establishing models and pertinent parametric analysis. Furthermore, the precision control of position and force were comprehensively investigated with academic interests; and finally, the goal of systematic research on micro-contact printing has been achieved for providing the solid backgrounds in key components design and system implementation.

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