Abstract
Beam shaping is the technique to change the energy distribution of the light beam. With the increasing demands for the applications of laser, the Gaussian energy distribution laser needs to transfer to flat-top distribution in some applications, such as laser processing, semiconductor processing and laser medical treatments. The line beam laser processing could be used for the annealing processing of the flat panel display and the solar panel production, or laser lift-off in the semiconductor processing. Most of laser line beam processing systems use multi-mode laser along with lenslet array as the homogenizer to achieve good uniformity. However the high coherency of the signal mode laser generates the interference patterns, which deteriorate the uniformity of light. In the article, by using the etching technique of MEMS to design and fabricate the cylindrical one-dimension reflective diffuser, which could solve the coherency problem causing bad uniformity by the single mode laser. By combining the diffuser with the lenslet array refractive system we could transfer the point light source into the high homogeneity line beam. Addictive manufacturing which is popular and developed gives a new way for the manufacturing, and it is widely used in many areas. The demands for the dimension are more and more accuracy. The highest resolution addictive manufacturing systems commonly use two-photon polymerization (TPP) with a microscopic objective lens that could break through the diffraction limit. The article predicts to use the diffractive method that uses two phase type LCOS spatial light modulator along with the computer holograms to shape the Gaussian laser beam into the flat-top distribution point source. Then overlap parts of the two points to create a new point that could improve the processing size or accuracy. Besides, using TPP method solidifies the resin, and expects to reach the small dimension demands.