Abstract
As the requirement for magnetic rigid disk drive’s data recording was getting higher, disk’s manufacturing technique would be more important, especially the polishing process since with the better surface characteristics, it would be helpful for the increase in data recording in the disk substrates. Therefore, how to improve the surface characteristics of disk substrates in polishing process would become an important topic.In this study, experiments are conducted to reveal effects of polishing parameters including rotational speed, applied pressure, slurry concentration, pad type and its groove type on surface characteristics, including surface roughness, waviness, flatness and removal rate when polishing glass-ceramic based rigid disk. Their effects would be analyzed with analysis of variance (ANOVA) to determine which parameters would have significant effect on surface characteristics, and also provide the directions that could improve disk substrate surface characteristics efficiently in polishing process. Experimental Results show that surface roughness and waviness and removal rate could be improved by adjusting the levels of polishing parameters while it has insignificant effect on surface flatness improvement.