Abstract
This dissertation presents the study of a prototype vibration-induced micro power generator. A miniature micro power generator was designed ， fabricated and tested to investigate the feasibility of a wearable silicon micro power source. This prototype device consists of an energy-collecting electroplated copper coil of 100um thickness， a nickel-iron alloy (NiFe) suspension spring and a commercially available neodymium iron boron (NdFeB) magnet of dimension 2mm×2mm×1mm. The overall size of the micro power generator is 6mm×6mm×1mm. The average generated power is 0.32uW when the device is tapped gently with fingers. This tapping mimics the vibration when the device is worn on a person， and demonstrates the power generation feasibility by general human activity. An average power of 1.44uW was measured when the device was placed on a vibration bed excited with a sinusoidal signal of 50 μm amplitude.