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探討差分干涉顯微術量測特定形狀的透明待測物之表面形貌
Thesis

探討差分干涉顯微術量測特定形狀的透明待測物之表面形貌

徐意晴
Masters, 國立清華大學, 動力機械工程學系
2012

Abstract

差分干涉對比術 表面形貌量測 透明待測物 定量化相位還原 Differential Interference Contrast(DIC) surface profile transparent objects quantitative phase restoration
Due to the fact that opto-electronic products have become more and more popular in recent years, the demand for displays used in computer monitors, mobile phones, PDAs, digital cameras and tablet PCs has continued to increase significantly. General methods of measurement are not particularly suitable for these objects, which are often transparent and small. The previous study has shown that PS-DIC (phase shifting differential interference contrast interferometer) can be used to measure the profile of transparent specimen with inclined surfaces. However, to apply this technology within the actual production, we must consider more complex geometry measurements with quantitative DIC techniques. In this study, we aim to verify the feasibility of measuring specimens with different profiles, such as trapezoid objects with inclined surfaces and elliptic specimens. Software simulation system was first used to analyze the cause of reconstruction errors, and a method to amend such errors is consequently applied. Next, we set a transmitted PS-DIC measurement system to verify the simulation. The result can provide useful information to improve the accuracy of PS-DIC.

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