Logo image
探討待測物表面形貌對於差分干涉對比術量測的影響
Thesis

探討待測物表面形貌對於差分干涉對比術量測的影響

陳偉倫
Masters, 國立清華大學, 動力機械工程學系
2010

Abstract

差分干涉對比術 表面形貌量測 定量化重建 Differential Interference Contrast (DIC) topography
Transparent components such as thin-film transistors, glass substrates, and light guide plate are greatly employed due to the rapid development of optoelectronic industry. More and more transparent components with complex geometries are used to fulfill the need. Therefore, there is an increasing demand for measuring the profile of these transparent components. In the previous study, we adopted the differential interference contrast (DIC) technique to measure the sub-micron thickness of transparent objects with step high structure. It is of interest to further study the light propagation mechanisms in the transmitted DIC system when transparent component with complex geometry is measured. In this study, the wedge angle measurement of prisms is used as a stepping stone to study the effects of complex geometry on the DIC images and profilometery reconstruction results. The study might provide some valuable information for adopting the DIC technique to measure the profile of transparent objects with complex geometry.

Metrics

1 Record Views

Details

Logo image