Abstract
With its high refractive index and strong electro-optic properties, lead-zirconate-tinate (PZT) has a good potential of being a electro-optical modulation device, such as optical switch and Bragg waveguide grating, by utilizing its tunability of the refractive index.In this study, the PZT powder doped silica films on silicon or quartz substrate were prepared by a modified TEOS sol-gel process. The films were then annealed by conventional furnace or rapid thermal annealing method at 700℃ respectively, and were examined by field emission scanning electron microscope and spectro-ellipsometer.The crystallized PZT powder doped silica films followed by annealing treatment revealed good embedded adhesion, typical perovskite structure, low extinction coefficient, and reasonable refractive index change.