Abstract
This thesis presents integrate magnetic flux concentrator with AMR structures for out-of-plane magnetic field sensor. Through the magnetic flux concentrator, the out-of-plane magnetic field will convert to in-plane magnetic field, and this study proposes magnetic pillar array to be magnetic concentrator to improve it efficacy. This study contains the sensing mechanism of the magnetoresistive sensor and the theoretical derivation and simulation of the magnetic concentrator. In fabrication process, it is using photoresist to be a mold and electroplating the nickel pillars to implement magnetic pillar array. Finally through the static measurement to check the geometry properties and magnetic properties and the performance test to verify the feasibility of the component.