Abstract
Abstract A series of copper (II) complexes with good volatility have been synthesized successfully by reactions of copper (II) chloride and the sodium salt of hexafluroacetylacetonate and various kind of amino-alcohols. These complexes are proved to be air stable and their thermal behaviors were investigated by TGA and discussed in detail. The single-crystal X-ray diffraction studies of 2 indicated that this series of complexes exist in dimeric form. CVD experiments of 5 and 6 were conducted with a vertical cold-wall reactor. High purity copper metal thin films could be deposited under argon as well as hydrogen atmosphere. All of the films were characterized by SEM, XRD, ESCA and four-point probe technique, and the causes to influence the properties of the films such as resistivity, surface morphology and composition were fully discussed.