Abstract
Generally, the integration of the geometrical optical component with micro system is difficult, because the semiconductor or MEMS machining is usually two dimensional. In this study, the polymer optical components dispensed in the buffer liquid is designed and implemented. The fully symmetric spherical lens is successfully formed in the buffer liquid. The ball lens can be used in both in-plane and out-of-plane directions. The polymer lens fabrication process provides a quick forming method for micro ball lens, with perfect surface roughness and self alignment. Moreover, the integration of such 3D polymer lens on SiOB is also demonstrated. Thus, the integration of ball lens on SiOB can be applied for various optical applications, for instance, the barcode scanner.