Abstract
With the increase in the size and weight of wafers in semiconductor manufacturing, heavy work loading has become a critical ergonomic issue due to the majority of operators as female. In addition, the lagers the wafer size, the more narrow the CD uniformity. In order to increase the yield, the wafers should be processed in clean environment. However, past research have indicated that the defect source is mainly from human .Therefore, it is unavoidable that Automated Material Handling System, AMHS, has been adopted by worldwide Fabs to prevent particles from operators. Now that AMHS is a standard interface between wafer transportation, the efficiency of vehicles must be increased as result of yield increase. However, it is challenging to face the problems as the exact quantity of vehicle to efficient inter-Fab transmission, the queuing time of vehicle in buffer area causing longer transportation period and the destination of where the vehicle to go based on inter-Fab efficiency. This study proposes a mythology for inter-Fab transmission that the quantity and areas of buffers can be determined under the assumption of production capacity. An empirical study is applied in a Fab to validate this proposed methodology. Impressively, it is found that the queuing and waiting time is the shortest and the transmission quantity is the most when Buffer is 4. Key words: Semiconductor manufacturing, Automated Material Handling System (AMHS), Inter-Fab Transmission, Simulation