Abstract
CNT (Carbon Nanotube) is the one with excellent electric & physical properties, as well as good in mechanical & chemical performance. In research of next stage flat panel field emission display, cold cathode array material need good field emission performance, and ought to be integrated with Si process at the same time. Therefore, CNT is suggested as candidate for key material of cold cathode array. Among all method for CNT preparation, chemical vapor deposition to form large array thin film is the trend nowadays.MPECVD (Microwave Plasma Enhanced Chemical Vapor Deposition) or Thermal Pyrolysis CVD has been proven as effective CNT growth process. When it comes to commercial application, however, MPECVD shows the shortcoming which heating without uniformity in large area, and Thermal Pyrolysis CVD is blamed by heating slowly, restricting sample size, and the system as a whole at high temperature during process. With microwave related equipment usage experience, our lab has presented a method called "MHTCVD (Microwave Heating Thermal Chemical Vapor Deposition)" to blend merits of the two above, and it will be a good start for advanced research in CNT growth.To coat catalytic metal on substrate directly, it used to take evaporation, sputter, or spray coating. But catalytic metal atoms prepared by PVD method (evaporation, sputter, etc.) are less active for CNT growth, while it's much questioned on attachment & uniformity by spray coating method. With selection of catalytic solution and control of each coating parameters, however, all disadvantages mentioned above will be improved greatly by our simple spin coating process. Therefore, we expect that such spin coating will be competitive for future industrial application.The research grows CNTs by MHTCVD with organic metal catalyst spin coated on substrate. The aim of research is through control of series parameters in catalytic coating, including solution concentration, spin rate, baking temperature, and hydrogen plasma reduction power, etc., to observe different effects on surface distribution of catalytic metal. And the different surface distribution will further lead to different spatial distribution & structure of CNTs after thermal pyrolysis. With microstructure observation, field emission current measurement, Raman spectroscopy & TEM analysis, we found it performs well based on catalytic metal atom clusters prepared by 0.5 M in solution concentration, 30/70 in spin rate, baking temperature of 110?C & 10 min., and hydrogen plasma reduction power with 1200W & 5 min. CNTs which grow with above parameters are good in attachment, uniformity, structure, and field emission property, and these parameters could be determined for future process integration.