Abstract
This plain is "large area planar microwave plasma Source". A 12-period vane-type slow wave structure is constructed to from a tunable surface wave cavity which is operated at π-mode and 2.45 GHz. We will discuss about the microwave propagation characteristics in this structure and take linear analysis of the process of treating plasma. The main analysis includes three parts: 1.The dispersion relationship of the propagation wave. 2.The distribution of electric field. 3.The effects of the structure size and π-mode resonance frequency.