Abstract
Glass possesses better optical characteristics and bio-compatibility than most polymeric materials. Besides, the nanoimprinting process is considered to be areproducible and mass production technique. In this study, ANSYS Multiphysics 10.0 is employed to build the simulation model for glass imprinting process. Assuming glass is a Newtonian fluid as it is over glass transition temperature, the simulation investigates the influences of parameters on the formability of glass imprinting such as the imprinting velocity, working temperature, the size effect of the mold, substrate effect and filling geometric forms. According to the experimental and simulation results, the glass forming mechanism by imprinting process is identified and the material, geometry, and process parameters are recommend. This study successfullydirect imprint nano/micro patterns on the glass substrate; the pitch size is minimized to 293.1 nm and the formation height 138.3 nm at the temperature 625 K. The repeatability od the process is proved to be stable by employing the designed imprinting machine and process parameters.