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氮摻雜對微波CVD鑽石薄膜場發射性質影響之研究
Thesis

氮摻雜對微波CVD鑽石薄膜場發射性質影響之研究

施權峰
Masters, 國立清華大學, 材料科學工程學系
1998

Abstract

鑽石 場發射 化學氣相沉積法 diamond field emission CVD
In this paper,we use MPECVD to deposit diamond films on silicon and gold substrate,mixed with methane, hydrogen and urea.We use SEM, four point probes, Raman, FTIR, field emission J-E measurement to realize the thin film properties and try to find out the behavior of nitrogen in diamond films. In my study, when pure urea mixed with hydrogen and methane,we got the best field emission properties:low turn on field as 0.56V/mm,and a high emission current density as 2665 mA/cm2 at 1.5 V/mm.It seems that the G-band or the C-N bonding should account for the better emission properties. In addition,through the interface study, we find that the gold interface can improve the emission proerties.

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