Abstract
Three atomic molecules adsorption on the Si(100) surface was studied. In this thesis, we investigated the reaction between water molecules and isolated single and pair dangling bonds. Adsorption of single dangling bonds with water molecules was first observed. The influence of two dimensional surrounding on the reaction was also discussed by comparing the reaction behavior of the dangling bonds surrounded by the hydrogen terminated and the partial hydroxyl terminated surface. We also offer a new approach to investigate the adsorption of water by introducing chlorine to the partial water terminated surface. By this method, we could easily identify the hydrogen and hydroxyl on the surface, which were dissociated form the water molecule. New types of adsorption of water on the Si(100) were found and showed and cast in this thesis.