Abstract
In this work, a rapid heating and cooling system (RHCS) for synthesizing carbon nanotubes (CNTs) array through the thermal chemical vapor deposition (CVD) process is proposed. Depending on the catalyst been used, single-wall or multi-wall CNTs can be synthesized. The catalyst for multi-wall CNTs is Fe and the length of CNTs array is over 100 μm. For fabricating single-wall CNTs (SWNTs), the catalyst is Al/Fe/Mo and the ID/IG ratio of the synthesized single-wall CNTs is around 0.03. The longest SWNTs been synthesized is over 3μm. In this study, the influences of Al layer on the growth of SWNTs are discussed. Moreover, in order to enhance the CNT growth, water vapor was introduced into the chamber during CNT growth. Different timing for the introducing of water vapor into chamber was designed and the influences of water vapor on the CNT growth are investigated. Field-emission scanning electron microscope and Raman were adopted to study the variation of structure.