Abstract
In this paper, we present a novel micro valve. The micro valve is an important device of the micro fluid system. It can govern the direction and the flow rate of the fluidic flow. It can also control the process step of a chemical or bio reaction. For an active micro valve, it is often driven by heating, electrostatic, Pneumatics etc. With this novel design, the micro valve is driven by the difference of the pressure of the fluid flow. This is the first present that the driving force takes advantage of the fluid flow itself.The micro valve contains a rotational mass and a pair of channel. With controlling the pressure of the input, we can control the mass rotation among three different angles. The three different angles determine the three kinds of transmission modes. From this, we can switch the fluid between the pair of channel.This micro valve is fabricated by bulk micromachining. We etch the profile of the rotational mass and the channels by ICP technique. Next step, release the rotational mass in order to rotate freely. Finally, bond the silicon wafer and the Pyrex no. 7740 by anodic bonding technique.