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液靜壓旋轉工作平台設計與測試
Thesis

液靜壓旋轉工作平台設計與測試

林銘震
Masters, 國立清華大學, 動力機械工程學系
2015

Abstract

旋轉工作平台 液靜壓軸承 雷諾方程式 有限差分法 Rotary table Hydrostatic bearing Reynolds equation finite difference method
With the need of high accuracy, hydrostatic bearing is often used in rotary table because of its high capacity, high stiffness and high damping. Hydrostatic bearing has been applied abroad for a long time. However, the capability of Taiwan machine-tool in hydrostatic bearing area is still quite limited. Therefore, it is intended to design hydrostatic rotary table for high precision circular grinding machine in this thesis. Comparing with roller bearing, the design and analysis of hydrostatic bearing is more difficult. In this thesis, the pressure distribution and hydrostatic bearing performance are obtained by solving the Reynolds equation with Finite difference method. After simulation, we designed an opposed hydrostatic thrust bearing and a hydrostatic journal bearing for the rotary table. Good agreement has been obtained between predicted theoretical results and experimental results. The results demonstrate that the axial stiffness of the hydrostatic rotary table is about 3,000 N/μm. Keywords: Rotary table, Hydrostatic bearing, Reynolds equation, finite difference method.

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