Abstract
Thick films of lead zirconate titanate of the morphotropic phase boundary composition, Pb(Zr0.52Ti0.48)O3, have been fabricated on Pt/Ti/SiO2/Si substrate using a modified MOD spin-coating technique.The films are ceramic-ceramic 0-3 composites made by dispersing ceramic powders in a metallo-organic carboxylate solution.PZT powders of controlled size around the nanometer range were prepared by hydrolyzing a mixture of the constituent metal alkoxides(Fig.1),.The metallo-organic precursors used for this system were Pb(C7H15COO)2, Zr(C9H19COO)4,and Ti(OC2H5)2(C9H19COO)2 (Fig.2).The fired film is a composite material consisting of a ceramic thin film matrix with bulk ceramic powders dispersed throughout.This technique has advantages over other available fabrication methods such as plasma spray and electron beam evaporation because it is simple,more economically feasible and allows coating of complex geometries. It was found that careful control of the chemistry of the precursor solutions,in particular the control of the suspension of PZT powder in PZT carboxylate precursor,resulted in reproducible solution which could be used to preparation thick layers with superior properties.Film thickness and morphology of each layer is affected by powder content,suspension in the precursors,and thermal treatment.In general,ceramic films of up to 0.3μm are deposited in a single layer and thicker films are achieved by deposition multiple coats(Fig.3).The powder size in solution,film thickness,structural development and electrical properties of films were characteristized using small angle x-ray scattering(SAXS),SEM,XRD and ferroelectric test system.