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準垂直型雙擴散金氧半場效電晶體特性分析
Thesis

準垂直型雙擴散金氧半場效電晶體特性分析

Tseng, Fu-Chun
Masters, 國立清華大學, 半導體元件及製程產業研發碩士專班
2009

Abstract

準垂直 雙擴散 金氧半場效電晶體 QVDMOS QVDMOSFET quasi vertical
English Abstract In this thesis computer aided simulation tools are used to design a Quasi Vertical Double Diffused Metal Oxide Semiconductor Field Effect Transistor (QVDMOSFET). The proposed new structure QVDMOSFET has breakdown voltage BVOFF = 99.64 V ; specific turn-on resistance RON,SP = 120.90 mΩ x mm2; and area size = 28.0 x 1μm2) . This thesis provides the research results of structural effect influence on BVOFF and RON,SP in QVDMOSFET.

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