Abstract
Wet bench etchers have wide applications in semiconductor fabrications, duc to process chemical characteristics, each batch must be processed without any waiting between adjacent chemical processes. This “no-wait” characteristics created complexity in the dispatch time of each batch to the wet bench. Considering wet bench processing as a general flow shop dispatching problem, the research solve the problem in two stages.The first stage has time-slot-set insertion algorithm to optimize the between-lot holding time for maximun machine throughput. The testing results show that substantial improvement over collaborative plant’s current situation. The second stage compares the efficiency between modified Bertollisi algorithm and Christopher’s Tabu search for the ordering of product batches. Bertollisi algorithm has efficiency in computing time and Tabu search has efficiency in quality of scheduling solution The selection of metholds is depend on scheduling demand.Keyword：wet bench, no-wait schedule, flow shop, robot transportation