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無晶形矽影像偵測器之研製
Thesis

無晶形矽影像偵測器之研製

嚴定旭
Masters, National Tsing Hua University
1984

Abstract

無晶形矽影像偵測器 AMORPHOUS-SILLICONIMAGE-SENSORAURER-MAPPING
An amorphous-silicon image sensor IC is proposed in this thesis. The unitcell consists of an amorphous-silicon field effect transistor, an amorphout-silicon photoconductor and an MIS capacitor. The fundamental properties of the cell are investigated. The Auger mappings are taken for examining our fabrication processes.

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