Abstract
In many research and industrial processes, temperature is a key parameter governing reaction kinetics, product performance, and process control. Conventionally, physical probes such as thermometers and thermocouples are used to measure temperature. These probes often have limited utility. Typical limitations include their physical size, their interference with applied electric or electromagnetic fileds. Hence, we adopt temperature-sensitive fluorescent dye such as Rhodamine B or any others to evaluate thermal effect. Fluorescent probes not only overcome the limitations of physical probes but also allow temperature measurements directly to evaluate the distortion of critical dimension due to heating in electron beam lithography. This thesis contains three parts. First, we try to study the temperature-sensitive characteristics and mechanism of Rhodamine B and explore the parameters about thermodynamics. Second part, application of Rhodamine B in electron beam lithigraphy to evaluate the temperature corresponding to exposure dose and observe the phenomenon of temperature difference using different materials. Third part, using Rhodamine B to test and verify the accuracy of imprint temperature in Nanoimprint lithography(NIL). Using NIL molds fabricated in different imprint temperatures evaluate the transfer integrity of defined pattern.