Abstract
Microlens fabrication is a main technology in MOEMS field, and is broadly applied to image forming, optical communication, and biotechnology. In the past few years, more and more people started to study tunable focal length mocrolens. Because of the development of tunable focal length microlens, it made simpler system designs and smaller devices volumes other than using the out-of–plane optical bench. We proposed a new type solid tunable focal length microlens by combining thermal actuators and choose PDMS as lens material. Besides, we discussed several microlens design parameters by using finite element analysis to find out best design trend. The measurement results showed the feasibility of solid tunable focal length microlens and agreed with the simulation results. The focal length varies from 2851 micrometers to 1712 micrometers, and the response time is about 1.6 seconds. The solid tunable focal length microlens in our study is still a prototype. We also proposed some new ideas for next generation for better performance in the end of this thesis.