Abstract
Due to the rapid growth of optics industry in Taiwan recently, the precision inspection technology for optical elements has gradually shown its importance as well. Because the technology must rely on high resolution and non-contact features embedded in fractions of inspection wave length, the inspection has become one of the important key technologies today. Based upon the fact that most traditional interferometers depends on reference lenses for measurement basis, lateral-shear interferometer has been adopted for lens measurement in this thesis because of the characteristic in non-reference lens measurement. With the aid of low environmental effects due to co-optical path based upon interferometry, Zernike polynomials have been employed for fitting of the third order coefficients in aberration; and, RMS errors have been shown as the assessment of accuracy in measurement. Finally, simulations on inspection of aspheric lenses have been conducted for evaluating influential factors and difficulties in the interferometer as well as the effects due to residual birefringence. The basic causal factors in optical qualities have also been investigated for plastic lenses fabricated with product imperfection. The objective is to establish the fundamentals in basic inspection technology for optics industry.