Abstract
本論文旨在設計與製作甲烷微感測器。其製作方法是利用矽微細技術為基 礎，採用矽材料為感測器元件的支撐主體，再以化學反應過程中催化劑的 特性為出發點，催化所要感測的氣體，最後再以溫度感測器感測反應的生 成熱。 甲烷微感測器的設計包括有加熱器、催化劑薄膜、溫度感測器 三大部份。而重要技術有KOH非等向性蝕刻和蝕穿技術製程的研究，此為 浮板與懸浮橋的製作方式，而這正是隔絕熱傳導效應的重要製程方法。 In this research, we will design and fabricate a methane microsensor . We design a new silicon based gas sensor structure, silicon as the substrate material, a heater, a temperature sensor, and utilize a catalyst to improve the sensitivity and selectivity of specific gas sensing. The basic principle is to measure the heat generation as a result of catalytic chemical reaction between the sensing material and the gas to be sensed. The sensor will consist of a heater, a temperature, a gas sensing functional thin film, and a thin film catalyst. The key technologies is KOH anisotropic etching and etching through. All these elements of the sensor are deposited on the silicon substrate which has a thin membrane for appropriate thermal isolation to have good device performance.